Abstract
A procedure involving normal-angle-of-incidence Kerr spectroscopy, variable-angle-of-incidence spectroscopic ellipsometry, and variable-angle-of-incidence spectroscopic magnetooptic ellipsometry has been developed. It makes it possible to extract layer thicknesses and optical and magnetooptical constants from individual layers within multilayered structures. The procedure is nondestructive, and it has been successfully applied to several materials systems, including Ag:Dy/Co:SiO. In addition, the advantages and disadvantages of this procedure as a means of studying component layers in multilayer films are discussed.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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