Abstract
Ferroelectric Bi4−xLaxTi3O12 (BLT) films were prepared by using a sol-gel method on Pt/(Cr, Ti)N/TiN/Ti bottom electrode. The BLT films crystallized by a flash-annealing (750°C, 30 sec, O2) were found to show excellent shapes of hysteresis loop in the P-E (polarization vs. field) characteristics. It was also found that the recovery-annealing (600°C, 60 min, O2) after the flash-annealing was exceedingly effective to decrease the leakage current of the films and to keep the ferroelectric property good.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
