Abstract
Ferroelectric Bi4−xLaxTi3O12 (BLT) films were prepared by using a sol-gel method on Pt/(Cr, Ti)N/TiN/Ti bottom electrode. The BLT films crystallized by a flash-annealing (750°C, 30 sec, O2) were found to show excellent shapes of hysteresis loop in the P-E (polarization vs. field) characteristics. It was also found that the recovery-annealing (600°C, 60 min, O2) after the flash-annealing was exceedingly effective to decrease the leakage current of the films and to keep the ferroelectric property good.
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