Abstract
A new multi directional bending and expanding motion actuator for a microsystem is proposed, and the static and dynamic experimental results are reported. This flexible actuator is composed of multi layered PZT unimorph cells. These cells are arranged vis-a-vis alternately with three micro pillars. Each PZT electrode is divided into three sectors and the sectors facing each other are connected electrically. Multidirectional bending is realized by single, double or triple driving of the sectors. Dimensions of the 40-cell actuator are 12mm in diameter, 20mm in length and 6.4g in weight. Static tests showed that the bending angle was 2.1 degrees with no load. The expansion displacement was 700μm with no load when all electrodes were simultaneously charged with 150V. Dynamic tests showed that the characteristic frequency was 95Hz at 25V.
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