Abstract
Abstract The chemical composition and electrical properties were investigated for epitaxially crystallized (Ba0.5,Sr0.5)TiO3 films deposited on Pt/MgO and YBa2Cu3O7−x(YBCO)MgO substrates by the laser ablation technique. Rutherford backscattering spectroscopy (RBS) analysis shows that thin films on Pt/MgO have almost the same stoichiometric composition as the target material. Films deposited on Pt/MgO at 600°C exhibited a dielectric constant of 330 and a dissipation factor of 0.02 at 100 kHz frequency. Leakage current density of BST thin films on Pt/MgO was smaller than on YBCO/MgO. Their leakage current density is about 0.8 u A/cm2 at an applied electric field of 0.15 MV/cm.
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