Characterization of Atomic Surface Roughness in Nanometric Machining Molecular Dynamics (MD) Simulations

Abstract

Background: The atomic surface roughness is very important in assessing the quality of high performance nano surfaces, in ultra-precision machining, and in silicon fabrication. The surface roughness of nano devices will invariably affect their quality and performance, so its understanding is very crucial. In this study, multi-pass nanometric atomistic simulations were employed in the characterization of this parameter to gain better insight. Keywords: Atomic surface roughness, nano surfaces, molecular dynamics, frictional forces, nanometric machining, multi-pass simulations.