Abstract
Anatase type (Sn x Ti 1− x )O 2 solid solutions, which have compositions ranging from x=0 to x=0.02, were grown by chemical vapor deposition (CVD) from TiCl 4, SnCl 4, and H 2O. The solid solutions were studied by inductively coupled plasma (ICP) spectroscopic analysis, X-ray diffraction (XRD), scanning electron microscopy (SEM), energy dispersive X-ray (EDX) spectroscopic analysis, high resolution transmission electron microscopy (HRTEM), and selected area electron diffraction (SAED). A linear relation between lattice parameters and SnO 2 contents of the solid solutions was found. The c / a ratio of the anatase structure increased as the SnO 2 content increased. Point defects of oxygen non-stoichiometry or Cl impurity were not likely to influence the lattice parameters drastically. Neither amorphous phases nor ordered structures were found in the anatase type (Sn 0.2Ti 0.8)O 2 solid solution crystals by HRTEM or SAED.
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