Abstract
We report on the performance of a superconducting NbSi transition edge sensor (TES), which is co-evaporated on a suspended SiO/SiN/SiO trilayer membrane. The temperature sensitivity coefficient (\alpha) calculated from the measured resistive transition curve is as high as 200. The current-voltage characteristics were measured at bath temperatures varying from 288 mK to 440 mK using a two-stage SQUID amplifier, from which the thermal conductance (G) was found to be 345 pW/K. We also measured the current noise at different bias voltages at 288 mK. The obtained electrical noise equivalent power (NEP) from its calculated current responsivity and measured current noise is about 8\times 10{-17} \hbox{W}/\surd{\hbox{Hz}}. In addition, the preliminary measurement results of time domain multiplexing scheme based on the superconducting quantum interference devices (SQUIDs) and an application specific integrated circuit (ASIC) are presented.
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