Abstract

An inkjet- and 3D-printed capacitive sensor system with an all-digital and flexible sensor read-out hardware is reported. It enables spectrometer devices with significantly reduced device outlines and costs. The sensor is developed as multilayer inkjet-printed electrode structure on a 3D-printed copper housing. Very high required position resolutions of and a wide measurement range of = 1000 m at an offset of = 1000 m in the considered spectrometers motivate this work. The read-out hardware provides high sampling rates of up to and enables the generation of trigger signals, i.e., the mirror control signal, without a time lag. The read-out circuitry is designed as a carrier frequency system, which enables flexible choices of bandwidth and measurement signal frequency. It thus allows for separation in frequency from coupling parasitics, i.e., other frequencies present in the device under test, and makes the read-out quasi-noise-immune.

Highlights

  • Related research presents spectrometer systems based on optical Micro-Opto-Electro-MechanicalSystem (MEMS, MOEMS) devices [1,2,3,4,5,6]

  • The suggested mirror position sensing system is shown. It is composed of a multilayer inkjet-printed capacitive sensor followed by a Low-Noise Amplifier (LNA) analog font-end and all digital signal processing on a Field Programmable Gate Array (FPGA)

  • The considered hardware holds a custom analog circuitry attached to an FPGA to provide flexible signal processing

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Summary

Introduction

Related research presents spectrometer systems based on optical Micro-Opto-Electro-MechanicalSystem (MEMS, MOEMS) devices [1,2,3,4,5,6]. Since miniaturization of the spectrometer allows its usage on mobile platforms (e.g., mobile robots, drones), the developed system should be robust against changing environmental influences as well as immune against the high actuation voltages (uexc ≈ 90 V@ f exc = 1 kHz) at the electrostatic drive Rapid prototyping technologies, such as 3D- and inkjet-printing, provide the necessary flexibility to produce optimized sensors that are immune to production inaccuracies (compare [10]). The suggested mirror position sensing system is shown It is composed of a multilayer inkjet-printed capacitive sensor followed by a Low-Noise Amplifier (LNA) analog font-end and all digital signal processing on a Field Programmable Gate Array (FPGA)

Spectrometer System
Michelson Interferometer
Rapid-Scan Interferometry
MEMS Mirror
Sensor System
Inkjet-Printed Electrode
Read-Out Hardware
Analog Design
Digital Signal Processing
Experiments
Hardware Resolution
Disturbance Rejection
Findings
Conclusions
Full Text
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