Abstract
This paper presents an integrated sensor able to perform contactless measurements of dc electrical current. The microsensor conceived is based on the PiezoMUMPs technology which embeds a layer of piezoelectric material thus offering a mechanoelectric transduction of the measurand: the dc electrical current flowing into a wire external to the microsensor is here converted into a voltage signal without the need of auxiliary polarization signals or integrated inductors/coils as in the case electrostatic and electromagnetic devices, respectively. A prototype of the MEMS device has been designed, modeled, numerically simulated, and then fabricated. A measurement campaign allowed validating the sensor and to characterize its performances.
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