Characterization of a microwave-excited atmospheric-pressure argon plasma jet using two-parallel-wires transmission line resonator

Abstract

This paper presents a method to produce a microwave-excited atmospheric-pressure plasma jet (ME-APPJ) with argon. The plasma was generated by a microwave-driven micro-plasma source that uses a two-parallel-wire transmission line resonator (TPWR) operating at around 900 MHz. The TPWR has a simple structure and is easier to fabricate than coaxial transmission line resonator (CTLR) devices. In particular, the TPWR can sustain more stable ME-APPJ than the CTLR can because the gap between the electrodes is narrower than that in the CTLR. In experiments performed with an Ar flow rate from 0.5 to 8.0 L·min−1 and an input power from 1 to 6 W, the rotational temperature was determined by comparing the measured and simulated spectra of rotational lines of the OH band and the electron excitation temperature determined by the Boltzmann plot method. The rotational temperature obtained from OH(A-X) spectra was 700 K to 800 K, whereas the apparent gas temperature of the plasma jet remains lower than ∼325 K, which is compatible with biomedical applications. The electron number density was determined using the method based on the Stark broadening of the hydrogen Hβ line, and the measured electron density ranged from 6.5 × 1014 to 7.6 × 1014 cm−3. TPWR ME-APPJ can be operated at low flows of the working gas and at low power and is very stable and effective for interactions of the plasma with cells.