Abstract

A method is developed to determine the elastic and piezoelectric properties of piezoelectric films by the resonance frequency spectrum of a two-layered composite resonator consisting of a film and a substrate plate. The parallel resonance frequencies are determined from the mechanical properties of the two layers only, allowing the density /spl rho//spl circ/ and the elastic constant C/spl circ//sub 33//sup D/ to be determined independently. The electromechanical coupling coefficient, k/sub t//sup 2/, can be directly calculated from the distribution of the effective coupling coefficients, k/sub eff//sup 2/, which are given by the parallel and series resonance frequencies of the composite resonator. The accuracy of the method is evaluated by numerical examples.

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