Abstract

CuInSe2 thin films were prepared by the ICB (ionized cluster beam) technique on glass substrates. It is found that the apparent grain size increased more than 1 µm when Cu cluster is ionized, even in In-excess CuInSe2 films which usually shows a specular surface with a small grain size of less than 0.2 µm. These films were characterized by photoluminescence (PL) spectra employing Ar and YAG lasers as excitation sources. In those films with a slightly In-excess composition, the 0.85 eV-peak was observed, which has been correlated with the good solar cells performance. The PL peak gained intensity with the increase of acceleration voltage of In-cluster up to 2 kV. It is concluded that ICB is a promising technique for preparation of good quality CuInSe2 thin films for solar cells.

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