Abstract
Only few experimental techniques are able to characterize the space and size distributions of gas-filled nano-cavities embedded in ceramic matrices. The aim of the current paper is to point out the potentiality of atom probe tomography for this objective. Nano-clusters enriched in Xe are evidenced in 3-D reconstructed volumes in Xe-implanted CeO2. Their size and density are comparable to bubble populations observed by TEM.
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More From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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