Abstract
The reversible oxidation–reduction reaction of 9,10-anthraquinone-1,8-disulfonic acid potassium salt (1,8-AQDSA-K) was characterized using mass spectrometry and UV-visible spectrophotometry. Quinone derivatives such as anthroquinone disulfonic acid (AQDSA) or its salts were found to promote selective oxidation of tantalum in chemical mechanical planarization when used in slurry formulations. In general, additives with a redox potential between tantalum and copper resulted in a high selectivity of tantalum to copper removal in barrier applications. The details of representative redox reactions and kinetics are presented for AQDSA.
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