Characterization and stabilization of an electron-cyclotron resonance plasma source using an automatic microwave tuner

Abstract

An automatic microwave stub tuner (AST) has been developed and used to characterize and stabilize an electron-cyclotron resonance (ECR) plasma source. The tuner provides a new method for measuring plasma impedance dynamically without disturbing the plasma. The Ar ECR plasmas were excited by a 2.45 GHz microwave (<800 W) in the presence of the static axial magnetic fields ranging from 875 to 2000 G, and the characteristics were investigated using a double probe and the AST. Results of these measurements indicated that the Ar ECR plasma had discrete stable modes where the plasma parameters and impedance varied continuously. For certain operating conditions, slight shifts of microwave power and/or magnetic-field strength brought about discontinuous mode transitions. In the transition regions, the drastic changes of plasma characteristics were observed, resulting in the instability of the plasma. It was quite effective for stabilizing the unstable plasmas to control the reflection coefficient of the microwave transmission line.