Abstract
TiN/TiCN films were prepared on AZ31 by physical vapor deposition. Structural features and residual stress were determined by X-ray fluorescence (XRF), scanning electron microscopy (SEM) and based on the grazing incidence X-ray diffraction (GIXRD), respectively. Results show that films have (111) preferred orientation. With a increasing of the reaction gas ratio, the C + N and Ti content increases first then decreases, and reach at the maximum value when the gas ratio is 15/5/3. Film have uniform thickness, and the hole shape defects appears in partial film and non-uniformly distribute on the surface of the film. The residual stress was tensile stress, and the residual tensile stress value decreased with the increase of the reaction gas ratio.
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