Abstract
A magneto plasma dynamic arc-jet (MPD arc-jet) can introduce a large energy pulse to a source gas and enable synthesis amorphous carbon films consisting of sp2 and sp3 bonds (hybrid amorphous carbon). The process conditions which affect the structure and the properties of the synthesized films are described here. Homogeneous films were obtained using the MPD arc-jet technique. Films were also in-situ modified with modifier gases due to the excellent characteristics of the MPD arc-jet. A substrate temperature of 200°C and a bias potential of -200 V resulted in harder films. The hardness are related to the hydrogen content and chemical bond nature of the carbon in the films. Homogeneity in the deposition direction could be achieved by in-situ modification. The refractive index, hardness, and other properties of the films were controlled by this modification.
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