Abstract
This paper proposed a method for the in-situ characterization of force applied to the MEMS-based inertial delay slider mechanism. The mechanism mainly includes MEMS W-type spring, sliding gear guide structure, card pin, etc. The force applied on the mechanism, including the spring force, the friction force between the slider and the sliding gear, and the final clamping force could be measured in a single run. According to the measuring result, the calculated spring force and clamping force coincides with the experimental result. In this way, the model for the dynamic process could be validated and modified for an effective description of the operation of the mechanism.
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