Abstract

The YBaCuO films with Cu-rich composition were prepared on MgO (100) at 650–750°C by chemical vapor deposition using β-diketone metal chelates. in the films prepared at 650°C and 700°C, the degree of c-axis orientation was enhanced with the increase of Cu composition in the compositional region from Y:Ba:Cu=1:2:3 to 1:2:4, and the films with Cu-rich composition showed higher Tc values than the films with close to stoichiometric one. The films prepared at the higher temperature of 750°C showed no Cu composition dependence on the crystalline orientation and Tc value.

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