Abstract
In order to increase a deposition rate, we prepared YBCO films on metal substrate and SrTiO3 single crystal substrate by in-plume PLD method and compared superconducting properties, deposition rate and composition ratio with those of films prepared by the conventional PLD method. Typical T c of the films prepared by the conventional PLD on the IBAD-MgO substrates were 89.7 K and typical J c were about 3.0 MA/cm2 at 77 K in self-field. On the contrary those of films by the in-plume PLD were 87.9 K and J c were about 0.9 MA/cm2. The deposition rate of the in-plume PLD was 2 μm/hour in thickness which was about twice higher than that of the conventional PLD. A reason of the low superconducting properties would be off-stoichiometry within the film, especially Ba deficient composition. To improve the composition ratio of the films, we used off-stoichiometric YBCO target and investigated the superconducting properties. We were able to improve the composition of the films. However J c values were not improved. The primal reason why the J c values were low would be an outgrowth within the films.
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