Abstract
Ceramic materials have the advantage of abrasion resistance, heat resistance, and corrosion resistance compared with metal materials. The combination of ultrasonic vibration and polishing slurry has been shown to be an effective method for machining holes in brittle materials. However, conventional ultrasonic methods use only longitudinal vibration. Complex vibration sources with diagonal slits have been applied to ultrasonic motors and ultrasonic welding; in contrast, few studies have been conducted on ultrasonic machining using complex vibration and polishing slurry. Removal rates and machining accuracy are expected to be improved by using ultrasonic complex (longitudinal-torsional) vibration. Therefore, we have developed a new method using polishing slurry together with ultrasonic longitudinal and torsional vibration sources with diagonal slits for hole machining of brittle materials. Torsional vibration is considered to improve the processing of the hole side of ceramic materials such that the polishing slurry can circulate more easily. We assume improvement of removal rate and machining accuracy for that reason. In experiments, soda-lime glass is used as the processing material in ultrasonic complex vibration or ultrasonic longitudinal vibration, and machining time is measured to assess the hole machining characteristics.
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