Abstract
Ultrafine particles have been widely used in many high technology industrial areas. The spherical nonagglomerated and uniform nanometer-size SiOparticles are synthesized by the direct injection of TEOS(Tetraethyorthosilicate) using electro-hydrodynamic spraying method. Electro-hydrodynamic spraying can generate submicron-size TEOS droplets having high electric charges by applying a high electric field between the liquid injection nozzle and the reaction tube. These TEOS droplets are evaporated, and thermally decomposed or oxidized to produce nanometresized SiOparticles in the reaction tube. Spherical, nonagglomerated and ultrafine particles are generated in various conditions and examined by using SEM and SMPS. As the total gas flow rate in the furnace changes from 1.5 lpm, the mean diameter of SiOparticle decreases from 120 nm to 68 nm. The synthesized particle charging fractions are also investigated.
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More From: Transactions of The Korean Society of Mechanical Engineers B
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