Abstract
Abstract A dc magnetron sputter (dcMS) deposition and a pulsed dcMS deposition methods were used respectively to deposit TiN and W 2 N coatings in a mixture gas of Ar and N 2 . Single layer TiN and W 2 N were first obtained to determine the deposition condition for the multilayers. TiN/W 2 N multilayers were deposited and the effects of the substrate rotation speed and the N 2 /Ar concentration on microstructure, hardness, and the corrosion property have been examined. It was observed that the multilayer TiN/W 2 N adheres well onto the substrate. In addition, the hardness and the anti-corrosion property of the multilayer are also better than that of the single-layer coatings.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
