Abstract
Circular spiral thin film inductors were fabricated using as-deposited magnetic multilayered films with ceramic intermediate layers, and a thin film inductor with a single magnetic layer was also fabricated for comparison. The magnetic multilayered films have good soft magnetic properties and high resistivity thus can decrease the eddy current loss. Employing the magnetic multilayered films, we got a higher quality factor (>30) and better inductor characteristics as compared with the inductor with a single magnetic layer, such as a high operating frequency (>80 MHz) without decreasing the inductance.
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