Abstract

Metal oxide semiconductors have become prominent materials in the electronic industry for producing state-of-the-art electronic devices. Optical and electrical properties of metal oxides can be modified by doping with a suitable element. The characteristics of calcium doped zinc oxide thin films deposited by spray pyrolysis method are investigated with a view to find the variation of bandgap energy with calcium doping. Calcium doped zinc oxide thin films are polycrystalline with hexagonal wurtzite structure. Thin films are uniform, crack-free and have relatively smooth surface. Spectroscopic analysis shows decrease in refractive index and red shift in optical bandgap by a magnitude of 60meV, when doped with Ca.

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