Abstract
The current methods of silicon coating deposition use toxic materials or have low growth rates and high energy consumption. Vacuum arc evaporation allows achieving high rates of coating growth along with low energy consumption. The main drawback of this method is the presence of microdroplets in the cathode erosion products that change the performance characteristics of coatings. In some cases, microdroplets can be used for the preparation of porous silicon layers. To predict the characteristics of coatings, one should know the characteristics of microdroplets generated in the vacuum arc discharge. The present work is dedicated to the experimental study of the sizes and shapes of microdroplets obtained in the vacuum arc discharge with a silicon cathode. We used a vacuum arc evaporator with controlled motion of a cathode spot to provide steady-state arcing on the silicon cathode. The typical shapes of droplets and their cross sections obtained on an atomic-force microscope are given. The distribution of drop amount in the coating as a function of drop shape is given.
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