Abstract
We report on the characteristics of rapid-thermal-annealed LiNi 1− x Co x O 2 cathode films for all-solid-state thin film microbatteries (TFBs). Scanning electron microscopy, atomic force microscopy, X-ray photoelectron spectroscopy and Auger electron spectroscopy results show that the surface oxide layer formed on the as-deposited LiNi 1− x Co x O 2 film is completely removed by a rapid thermal annealing process. All-solid-state TFBs consisting of Li/LiPON/LiNi 1− x Co x O 2/Pt/MgO/Si exhibit stable cyclibility and a high specific discharge capacity of 60.2 μAh/cm 2 μm. It is concluded that the Li y Ni 1− x Co x O 2 cathode could represent a promising candidate for a cathode film in TFBs.
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