Abstract
This paper reports on the degradation characteristics of moisture-sensitive Ta 2 O 5 /TiO 2 ceramic films, whose electrical capacitances change with relative humidity. The fabrication process and the capacitance characteristics of the tested samples are described. The durability tests against the temperature and humidity cycle and against 10 ppm CO or SO 2 gas in the atmosphere have been carried out. In order to examine the interaction between water molecules and toxic gases on the ceramic surface, the electrical capacitance and resistance changes are investigated using the samples placed in a vacuum containing traces of CO or SO 2 gas to which pure water is subsequently added. Finally, possible physicochemical effects on the electrical characteristics of the ceramic films are proposed.
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