Abstract
A low power atmospheric pressure plasma jet driven by a 24 kHz AC power source and operated with a CH4/air gas mixture has been investigated by optical emission spectrometer. The plasma parameters including the electron excitation temperature, vibrational temperature and rotational temperature of the plasma jet at different discharge powers are diagnosed based on the assumption that the kinetic energy of the species obeys the Boltzmann distribution. The electron density at different power is also investigated by Hβ Stark broadening. The results show that the plasma source works under non-equilibrium conditions. It is also found that the vibrational temperature and rotational temperature increase with discharge power, whereas the electron excitation temperature seems to have a downward trend. The electron density increases from 0.8 × 1021 m−3 to 1.1 × 1021 m−3 when the discharge power increases from 53 W to 94 W.
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