Abstract
AbstractRecently, surface acoustic wave devices have been used in many fields, for example as filters and so forth. However, since the device characteristics are determined by the substrate, the superior substrate for surface acoustic wave applications has been investigated. In this study, the leaky surface acoustic wave propagating in LiNbO3 has been evaluated theoretically and experimentally. First, the contour maps of the characteristics have been obtained for an arbitrary cut, and the propagation characteristics of the leaky surface acoustic wave in the LiNbO3 have been investigated. As a result, the standard for the substrate selection has been established. It was proven theoretically and experimentally that the proper selection of the cut could provide both the high electrical‐mechanical coupling coefficient (15%) and such excellent thermal characteristics as zero temperature coefficient which could not be obtained by conventional devices using Rayleigh wave propagation. As a result, a large electrical‐mechanical coupling (13.1%) which agreed with the theoretical value, has been obtained and the thermal characteristic (50 ppm/°C), much superior to that of conventional devices, has been obtained.
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