Abstract
The floating potential of a cylindrical probe immersed in electronegative oxygen plasma has been experimentally investigated as a function of electronegative parameters, α=n−/ne and γ=Te/T−. In the experiment, the bulk plasma has been found to be largely Maxwellian amid a small component of hot electrons present in the discharge. The parameter α has been deduced from a phenomenological model for a range of operating powers and pressures. By optimizing γ in the phenomenological model, the negative ion temperature range has been estimated by comparing the measured floating potential with the theoretical curve. In the regime α>1, the floating potential has been observed to fall monotonically on increasing α in close agreement with the theoretical curve, whereas, the theoretical results predict an increasing trend for α<1. A qualitative discussion has been presented to explain the overall behavior of floating potential under the influence of negative ions.
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