Abstract
The subwavelength three-layer embedded grating is described under Littrow mounting for dual-function splitting. At the incident 800 nm wavelength, diffraction efficiency of TE polarization is 97.04 % for the optimized profiles. For TM polarization, diffraction efficiencies corresponding to 49.64 % and 49.80 % are obtained in two ports. The diffraction efficiency of the new embedded grating is higher than that of the previously reported surface-relief three-layer grating-based dual-function splitting. Moreover, the new grating can exhibit large deviation using angle.
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