Abstract
This paper proposes a double-planar-coil microinductor with patterned permalloy magnetic film for high frequency DC–DC integration. The effects of magnetic film’s patterning and thickness on the inductance and quality factor of the micro-inductor are investigated by using COMSOL Multiphysics software. Simulation results indicate that the magnetic film improves the inductance of microinductor effectively and patterning of the magnetic film reduces eddy current loss in high frequency range. The micro-inductor is fabricated by using micro-electro-mechanical systems (MEMS) technique. The inductance of approximately 2.17 μH at 1.5 MHz and the quality factor of 2.8 are achieved for the microinductor with patterned magnetic film. The performances of the micro-inductor applied in a low-power DC/DC converter are tested. The results indicate that the micro-inductor with the patterned magnetic film effectively has improved inductance and quality factor compared to that with non-patterned magnetic film. The maximum efficiency of measured converter is 67% at 1.5 MHz and the output current is 100 mA.
Highlights
With the decrease of size and weight of portable electronic products, the requirement of a power management chip for internal integration is becoming urgent
For micro-processors and mobile devices, thin film magnetic inductors are useful for integrated power delivery solutions, which will replace conventional wire-wound inductors [1,2]
With the rapid development of micro-electro-mechanical systems (MEMS) fabrication process and integrated passive devices (IPD) technology, the thin-film technology combined with MEMS process becomes one of the most advanced technologies to develop micro-inductive devices [6,7,8]
Summary
With the decrease of size and weight of portable electronic products, the requirement of a power management chip for internal integration is becoming urgent. For micro-processors and mobile devices, thin film magnetic inductors are useful for integrated power delivery solutions, which will replace conventional wire-wound inductors [1,2]. The use of thin-film magnetic inductors has the advantages of increasing inductance per unit and decreasing containment of magnetic fields compared to coreless inductors. It has the disadvantage of extra eddy current loss in the magnetic film, especially when the inductor works in high frequency. In order to reduce the eddy curreMnitcrloomsascheisnesre20s1u7,lt8e, 1d51from the magnetic film in high frequency, a planar inductor with p2aotfte9rned magnetic film has been developed in this study. The inductance value can be calculated according to following formula [13]
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