Abstract
Outgassing rates have been evaluated by measuring pressure with hot cathode gauges as a function of time. However, the large gas release from hot cathode gauges and the limited degassing time cause serious error in outgassing rate measurements in uhv. Although some investigations were reported on the pumping effects of the gauges with glass tubes, there are few data on the commercially available gauges in this application. In this paper, the gas release and pumping speeds of various commercially available gauges are measured quantitatively, including the characteristics of cold cathode/inverted magnetron gauges (IMGs). The maximum pumping speed of the IMGs is 0.1 ls −1, and the pumping speed at pressures in uhv is negligible. It is shown that the IMGs can be utilized in applications for low outgassing rate measurements in uhv.
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