Characteristics of Capacitive Membrane-Type RF MEMS Switches

Yeong-Lin Lai Yeong-Lin Lai,Yueh-Hung Chen Yueh-Hung Chen

doi:10.1109/isdrs.2005.1596118

Characteristics of Capacitive Membrane-Type RF MEMS Switches

Yeong-Lin Lai Yeong-Lin Lai, Yueh-Hung Chen Yueh-Hung Chen

https://doi.org/10.1109/isdrs.2005.1596118

Copy DOI

Publication Date: Dec 7, 2005

Affiliation: National Changhua University of Education

#Capacitive RF MEMS Switches #Capacitive RF MEMS + Show 8 more

Abstract
Full-Text PDF
Similar Papers

Abstract

In this paper, analysis of characteristics of capacitive membrane-type RF MEMS switches, have been developed on the basis of the finite element method. Both the static and modal analyses of the switches are conducted. The characteristics including the displacement, stress, effective stiffness constant, natural frequency, and switching time are studied. The structures of the switches are critical for determination of switch performance. How the characteristics of the capacitive membrane-type RF MEMS switches are affected by the structures of the switches is investigated comprehensively

Full Text