Abstract
Results are presented from the study of the electrical and optical characteristics of a transverse RF discharge in Xe/Cl2 mixtures at pressures of p≤400 Pa. The working mixture was excited by a modulated RF discharge (f=1.76 MHz) with a transverse electrode configuration (L≤17 cm). The emission spectrum in the spectral range of 210–600 nm and the waveforms of the discharge current, discharge voltage, and plasma emission intensity were investigated. The UV emission power from the discharge was studied as a function of the pressure and composition of a Xe/Cl2 mixture. It is shown that a discharge in a xenon-chlorine mixture acts as planar excimer-halogen lamp operating in the spectral range of 220–450 nm, which contains a system of overlapping XeCl(D, B-X; B, C-A) and Cl2(D′-A′) bands. Transverse RF discharges in Xe/Cl2 mixtures can be used to create a wideband lamp with two 50-cm2 planar apertures and the low circulation rate of the working mixture.
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