Characteristics of a sensitive micro-Hall probe fabricated on chemical vapor deposited graphene over the temperature range from liquid-helium to room temperature

Abstract

We have investigated the transport and noise properties of a micron-sized Hall probe, fabricated on chemical vapor deposited (CVD) graphene, from 300 K to 4.2 K. The field sensitivity of the Hall probe was tunable within ∼0.031-0.12 Ω/G, while the field resolution could reach ∼0.43-0.09 G/Hz1/2 at room temperature. The characteristics of graphene Hall probes (GHPs) were found to be comparable to present Hall sensors. Our results indicate that the fundamental limitation of the field sensitivity and the field resolution are respectively restricted by intrinsic and extrinsic defects. Our study paves the way for the use of CVD GHPs for scanning Hall probe with high field sensitivity and submicron spatial resolution at room temperature.