Abstract

We report the characteristics of 46.9, 69.8 and 72.6 nm lasers of Ne-like Ar in a plasma column pumped by capillary discharge. A main current of 12 kA with rise time of 40 ns was used to generate the plasma in a 35-cm-long capillary. The temporal and spatial characteristics of 46.9 and 69.8 nm laser pulses were measured. The time of lasing onset for the two lasers is about 35 ns. The pulse widths are about 1.3 ns for 46.9 nm laser and 1.2 ns for 69.8 nm laser. The FWHM beam divergences of the 46.9 and 69.8 nm lasers are approximately 0.5 and 0.4 mrad, respectively. The initial pressure ranges for 46.9, 69.8 and 72.6 nm lasers correspond to 13–24, 12.5–20 and 14–20 Pa, respectively. A gain coefficient of 0.58 cm−1 was measured and gain saturation behavior was observed at 46.9 nm, conditioning the initial pressure of 19 Pa. At the same discharge current, a 69.8 nm laser with gain coefficient of 0.41 cm−1 and a 72.6 nm laser with gain coefficient of 0.22 cm−1 were achieved by changing the initial pressure to 16 Pa.

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