Abstract
A charge exchange neutral particle analyzer including a newly designed multichannel 63.6° cylindrical electrostatic energy analyzer was constructed. Since the energy analyzer can simultaneously adopt a small radius of cylindrical electrodes and a large width of an entrance slit, high incident current can be analyzed while the size of the analyzer remain compact. Characteristics of the analyzer were investigated using hydrogen beam with energies from about 0.5 to 5 keV. The experimental results are compared well with the numerical analysis.
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