Abstract
<p>In the field of pressure measurement, numerous interlaboratory comparisons are carried out among National Metrology Institutes (NMIs) using a pressure transfer standard to verify the degrees of equivalence. Here, the Yokogawa electric corporation has been producing a series of digital manometers using a silicon resonant sensor developed independently. This sensor demonstrates excellent long-term stability and has thus been adopted as the pressure transfer standard by many NMIs and has been subsequently well received. The pressure transfer standard is known as the resonant silicon gauge (RSG) among NMIs. From December 2016, the National Metrology Institute of Japan (NMIJ), the Advanced Industrial Science and Technology (AIST) institute, and Yokogawa initiated a collaborative research with the aim of improving the characteristics of the RSGs and developing a portable transfer standard using a new silicon resonant sensor. The new RSG was adjusted using a standard device calibrated by either NMIJ or Yokogawa. The measurement values of the standard device were corrected with the calibration results and used as the standard values for adjustment of the new RSG. The linearity of the new RSG adjusted via the proposed method was improved compared with that of a conventional RSG.</p>
Highlights
The conclusion of the Mutual Recognition Arrangement of the Comité International des Poids et Mesures (CIPM-MRA) has promoted barrier-free trade in the globalised economy
The CIPM-MRA provides for the mutual recognition of the equivalence of national standards, with the equivalence ensured via international comparisons among the National Metrology Institutes (NMIs) [1], [2]
NMIs, including the National Metrology Institute of Japan (NMIJ) and the Advanced Industrial Science and Technology (AIST) institute, took notice of a digital manometer that is smaller, lighter, more portable, and easier to handle than the pressure balance
Summary
The conclusion of the Mutual Recognition Arrangement of the Comité International des Poids et Mesures (CIPM-MRA) has promoted barrier-free trade in the globalised economy. The long-term stability of the digital manometer is compensated by correcting the calibration values using the results of long-term stability evaluations [3]. These methods have made it possible to use the digital manometer for the transfer standard, and a number of international comparisons using these transfer standards have already been conducted. The digital manometers and pressure sensors developed by the Japanese electric company, Yokogawa, have been used for such transfer standards for international comparisons [4]-[6]. Yokogawa initiated a collaborative research in conjunction with NMIJ/AIST, which involves national standards and precise evaluation techniques, to improve the basic performance and characteristics of the new RSG
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