Abstract

This paper presents measurements and analyses of the strain and blocking forcesgenerated by three different piezoelectric actuators (PXE5, PC5H and Pz28) at lowelectric field in order to design micro-actuators for nanomotion. The degree ofnon-linearity and the strain activity are assessed by the introduction of a newparameter with an attempt to relate the capabilities of the actuators to theirpiezoelectric properties. The blocking forces and the strains were calculated using a finiteelement method and compared to measurements. The PC5H, a soft type, showedthe highest strain and blocking force due to its electromechanical properties.

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