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Abstract
Si-containing diamond-like carbon (Si-DLC) coatings with a Si content ranging between 0 (DLC) and 10 at.% were deposited by thermal electron excited plasma CVD method, and their characteristics and the tribological properties in water environment were investigated. The results showed that doped Si had little effect on the hardness and Young's modulus of the coatings. Increasing Si content reduced the friction and the wear of the mated ball, although the wear of the coatings increased. The wear of the counter ball occurred mainly in the early stage of rubbing. The Raman and XPS analysis revealed that the tribochemical reaction of Si-DLC coating occurred in water, and SiO x(OH) y gel was formed on the mated ball surface. It is considered that the tribochemical reaction is also responsible for the tribological properties of the Si-DLC coating and the counter ball, and the reaction may be accelerated by increasing the Si content. Failure-resistant capability is strongly governed by the characteristics of the coating, and can be improved by doping Si. There is an optimum Si content for increasing the failure-resistant capability and it was 6.6 at.% in this work.
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