Abstract

In this paper, a new slip model based on kinetic theory of gases for gas-lubricated journal bearings in micro-electro-mechanical systems (MEMS) is applied using a physical approach. The corresponding modified governing equation and mathematic model are presented and the flow rate is plotted versus the inverse Knudsen number. Pressure distributions along the gas bearing at various Knudsen numbers and bearing numbers are plotted and the load carrying capacities are also obtained. A numerical analysis of a rigid rotor supported by gas-lubricated journal bearings is presented for dynamic behaviour. The slip flow effect on the properties, including pressure distribution, load carrying capacity and dynamic coefficients, of the micro-gas-lubricated journal bearings and dynamic responses of the micro rotor-bearing system are estimated and analysed in detail. It is shown that the dynamic coefficients increase with increasing bearing number except for two damping coefficients and the rotor-bearing system runs at a much higher rotating speed to keep stable when slip flow occurs. Moreover, the oscillation period of the rotor operating with the slip model is longer than that with the continuum flow. In addition, the whirl frequency is reduced from 0.422 to 0.079 under the slip effect. Therefore, the results of this study contribute to a further understanding of the characteristics and nonlinear dynamics of gas-film rotor-bearing systems in MEMS.

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