Characteristic of p-Type Junctionless Gate-All-Around Nanowire Transistor and Sensitivity Analysis

Abstract

The characteristics and sensitivities of p-type junctionless (JL) gate-all-around (GAA) (JLGAA) nanowire transistors are demonstrated by simulating a 3-D quantum transport device with a view to their use in CMOS technology. The concentration of dopants in a p-type JL nanowire transistor is not as high as that in an n-type device owing to solid solubility of boron in silicon. However, we can use a midgap material as gate electrode to design an appropriate device threshold voltage. The p-type JLGAA transistor exhibits a favorable on/off current ratio and better short-channel characteristics than a conventional inversion-mode transistor with a GAA structure. Sensitivity analyses reveal that the channel thickness and random dopant fluctuation substantially affect the device performance in terms of threshold voltage ( <i xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">V</i> <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">th</sub> ), on current ( <i xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">I</i> <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">on</sub> ), and subthreshold slope because of the full depletion condition of the channel. The channel length and oxide thickness have less impact because the short-channel effect is well controlled.