Abstract
Transparent conducting oxide films of fluorine-doped SnO2 (FTO) were deposited on glass substrates by spray pyrolysis in order to determine the effect of spray solution concentration. These films were prepared with different F-doping concentrations from 0 to 33 mol %. The films were all polycrystalline with tetragonal crystal structures. The best electro-optic properties were achieved with a fluorine doping concentration of 17 mol % at a substrate temperature of 500 °C. These conditions resulted in a film with an average transmittance of 82%, a resistivity of 4.0 ×10-4 Ω cm, a carrier concentration of 4.7 ×1020 cm-3 and a mobility of 34 cm2 V-1 s-1.
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