Abstract
The actuation technique of a surface acoustic wave motor with nanometer scale linear motion was experimentally investigated in this study. The surface acoustic wave motor comprised a stator made of a Y+128° cut, X-propagation lithium niobate substrate with silicon sliders and an array of pillar projections manufactured using semiconductor fabrication techniques. Two sets of interdigital transducers deposited on the substrate were used to generate Rayleigh waves with a driving frequency of up to 9.7 MHz. The surface acoustic wave motor was driven by friction exerted on the contact area between the slider and the surface acoustic waves in a retrogressive elliptical locus. The stepping motion of the surface acoustic wave motor was measured directly using a fiber-optic Michelson interferometer through demodulation with a digital signal processing method. A displacement of several nanometers was achieved at each step during the experiment.
Highlights
With advances in the fields of science and technology, components have become smaller and more accurate
Acoustic waveguides are fabricated from piezoelectric materials, and their advantages include high precision, high rigidity, low volume, low weight, high power, high-frequency response, and low energy consumption
Waves transmitted through an acoustic waveguide should have a short wavelength and high frequency to allow nanometer-level actuation
Summary
With advances in the fields of science and technology, components have become smaller and more accurate. Based on the measurements conducted using two sets of laser Doppler vibrometers, the stepping movement of the SAW motor ranged between 10 and 20 nm under a preload of 15 N and driving frequency of 9.61 MHz. In this study, a 1-mm-thick lithium niobate substrate with a Y+128° cut was used.
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
