Abstract

A cross section set for scattering Ne+ ions in CF4 gas is assessed by using available experimental data for charge transfer cross sections. Calculated cross sections can be used to obtain transport parameters, specially characteristic energy and reduced mobilty for low and moderate reduced electric fields E/N (E-electric field strength; N-gas density) and accounting for the non-conservative collisions. These data are needed for modelling in numerous applications of technologically importance.

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