Characterising the performance of an ultrawide field-of-view 3D atom probe

Abstract

The CAMECA Invizo 6000 atom probe microscope uses ion optics that differ significantly from the local electrode atom probe (LEAP). It uses dual antiparallel deep ultraviolet lasers, a flat counter electrode, and a series of accelerating and decelerating lenses to increase the field-of-view of the specimen without reducing the mass resolving power. In this work we characterise the performance of the Invizo 6000 using three material case studies: a model Al-Mg-Si alloy, a commercially-available Ni-based superalloy, and a Zr alloy, using a combination of air and vacuum-transfer between instruments. The ion optics of the Invizo 6000 significantly increase the field-of-view compared to the same specimen on a LEAP 4000 X Si. We also observe a significant increase in specimen yield, especially for the Zr alloy. These results combine to make the Invizo 6000 well-suited to research projects requiring large analysis volumes, particularly so for traditionally difficult samples such as oxides.