Abstract
In recent years, sol–gel-derived films have played a significant role in optical sensor development. This paper focuses on the characterisation of oxygen-sensitive tetraethoxysilane (TEOS) and methyltriethoxysilane (MTEOS)-based films. Film porosity and sensor response times are reported for a range of films fabricated under different conditions. Porosity data are correlated with predicted film behaviour and also with previous characterisation studies. Oxygen diffusion coefficients are estimated from the response times. The enhanced diffusion coefficient of MTEOS films compared to TEOS films is discussed in terms of the relative oxygen solubility of the films. Comparisons are made with data for oxygen-sensitive polymer films, indicating an enhanced solubility for sol–gel films compared with typical polymer films.
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